The measurement method LAwave, developed at the Fraunhofer IWS with Fraunhofer CCD, allows non-destructive characterization of films and material surfaces. It uses short laser pulses to create surface acoustic waves. Their propagation velocity is then measured over frequency. The so-called dispersion curve depends on the elastic modulus (Young’s modulus), density, and thickness of the film. After measurement, the dispersion curve is fitted with a physical model to obtain the desired material parameters. It is also possible to characterize non-coated surfaces, for example gradients of the micro-structure such as machining layers and porosity.